Abstract
High-purity tungsten single crystals of different crystallographic orientations were prepared by electron beam floating zone melting as well as by a strain-annealing technique. The substructure of these substrates was examined by SEM, optical microscopy and X-ray diffraction methods. Samples were prepared with different crystallographic planes and with substructures free from small-angle boundaries. The samples had excellent structure parameters, as deduced from the full-width at half-maximum of the rocking curves which was less than 0.1° for the substrates prepared by strain annealing. The substrates were subsequently cleaned in UHV using a newly designed compact electron beam gun for heating to 2500°C. The surface cleaning procedures were studied using AES, LEIS and LEED. Clean and well-ordered surfaces were obtained.
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