Abstract
Ceramic powder casting technique using ovalbumin, i.e., egg protein, as natural amino-based binder. The study has shown successful gelcasting of high-performance 3D thermal conductivity aluminum nitride (AlN) for application in the 3D integrated circuits (3D-IC). The green body has a good flexural strength of 3 MPa, which is sufficiently be trimmed with computerized numerical controlled (CNC) machining prior to the pyrolysis manufacturing processes, i.e., sintering technologies. Different particle sizes of AlN powder was being investigated and the results indicated bimodal particle size ratio of 1.5 to 2 attributed the most favorable combination in this study. Doped of rare earth element, yttrium oxide (Y2O3) nano particle size, has shown an improvement in overall thermal conductivity of 3D sintered objects. SEM images also well demonstrated higher thermal conductivity value are linked with a compact structure of higher density of 3D ceramic objects.
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