Grain-size effect on the preferred orientation of TiC/α-C:H thin films

Abstract

The grain-size effect on the preferred orientation has been revealed in TiC/α-C:H nanocomposite films grown by magnetron sputtering, in which the grain size of TiC can be adjusted through changing C content in films. The finding is that the preferred orientation of films is significantly affected by the grain size, and the crystallographic orientation changes from face-centered cubic (fcc) TiC(111) to (200) as the grain size of nanocrystallite TiC decreases from ∼22.3 to ∼4.7nm. This size-dependent preferred orientation is explained via thermodynamic calculations, from which the size-dependent Gibbs free energies are found to be a key factor that controls the texture development in thin films if the grain size in films is sufficient small.