Abstract
Gold nanodot matrices made by diffraction mask-projection laserablation (DiMPLA) are presented. The nanodots are well ordered and can besynthesized on so far not accessible substrates by virtue of intermediate thinAlOx layers deposited by pulsed-laser deposition (PLD). Investigations were made on the influence oflayer thickness, roughness and type of substrate on the nanodots and their fabrication. It isshown that all of these parameters are crucial for the generation of nanodots on thinAlOx layers. The roughness of the layer and the substrate material determine whetherthe layer cracks upon laser patterning. The layer thickness, on the other hand,influences the size of gold nanodots on top. Extinction spectra show that theparticle size is the dominant contribution that shifts the plasmon resonance peak.
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