Generic vibration criteria–based dual-chamber pneumatic spring vibration isolation table design

Abstract

Dual-chamber pneumatic spring vibration isolation tables are commonly used as the base of precision equipment to isolate vibrations from the floor. During the design of dual-chamber pneumatic spring vibration isolation table, transmissibility is often taken as the performance measure, which does not represent the precision requirements directly and could not be adapted to different floor vibration conditions. In this article, a new performance measure is developed to obtain an optimum isolation performance during the design of a dual-chamber pneumatic spring vibration isolation table. Based on the generic vibration criteria, the weighted root-mean-square velocity of platform vibration in one-third octave bands resulting from the floor excitations is used as the new measure. The platform vibration is predicted by establishing a model of dual-chamber pneumatic spring vibration isolation table, which consists of a platform and four dual-chamber pneumatic springs. The model disturbance inputs are actual random floor excitations (7.98 µm/s, vibration criteria-C level), which are obtained by vibration acquisition test in a typical laboratory. The genetic algorithm is applied to solve this nonlinear optimization problem. The maximum weighted root-mean-square velocity of platform with the optimum design isolation table decreases to 2.35 µm/s, which provides a vibration criteria-E level environment.