Abstract
This paper presents a simulation study of the gate current through stacked dielectrics of interest for advanced nonvolatile memory (NVM) cells possibly employing high-k insulators to engineer the tunnel barrier. Program, retention and read disturb conditions are analyzed. The impact of modeling approximations on the predictions of the programming gate current in Fowler-Nordheim (FN) and channel hot electron (CHE) injection regimes is critically discussed. Comparison with a reference SiO/sub 2/ device allows us to identify some of the possible advantages and limitations of these stacks for future NVM.
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