Abstract
AbstractAmong all the potential applications of porous silicon, gas or liquid management through membranes is a key point in various micro‐system applications. In this paper, we compare the hydrogen flow through two different porous silicon structures. The first one is a 240 µm thick macroporous silicon membrane with pore diameters between 2 and 3 µm. The second one is a combination of a macroporous layer surmounted by a mesoporous one (average pore diameters of 10 nm). We present also a new method achieving the pore opening on the whole backside surface of the sample. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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