Abstract
The paper proposes a new design solution for regulating the distribution of the working gases in the vacuum chamber of the installation (UDP -850/4) for unbalanced magnetron sputtering, which will improve the mode and quality of application of multilayer nano-coatings. Constructive documentation for manufacturing a gas distribution system has been prepared, as well as instructions for assembly to the vacuum chamber.
Highlights
The technological coating process in an unbalanced magnetron sputtering installation (UDP - 850/4) is a wellknown modern method for depositing thin layers on substrates in order to improve their performance [8, 9, 10]
Whether physical or chemical, have some significant advantages, such as high level of purity, very good adhesion to the substrate, good uniformity and density of the layers, small residual stresses and microdefects in the structure, possibility for deposition of ultra-thin layers, very good possibilities for controlling the thickness, structure, mechanical stresses and other parameters of the layers, all of these leading to high quality of the obtained coatings [3,9,10]
It is necessary to build an individual line for supplying each target in the chamber with working gases, with an option to change the number of openings depending on whether the given material needs less or more nitrogen
Summary
The technological coating process in an unbalanced magnetron sputtering installation (UDP - 850/4) is a wellknown modern method for depositing thin layers on substrates (details) in order to improve their performance [8, 9, 10]. This is a vacuum technology (nanotechnology), based mainly on physical processes. Studies show that the main interrelated parameters, determining the rate of sputtering of the targets, are the discharge voltage, the discharge current, the induction of the magnetic field near the cathode surface, and the working gas pressure [5,6] In these systems the inert gas argon is usually used in the role of a working gas. This is a T-shaped tubular structure (pipe 6,3x4), in which the short, transversely welded pipe, serves for connection (inlet) to the gas supply system of the installation and, through the openings of the vertical pipe (ø 1), blocked at both its ends by a stopper - bolt - DIN 912 M5 x 8 ... 8N, the gases enter the working space
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