Abstract

Piezoelectric actuator is widely used in the field of micro/nanopositioning. However, piezoelectric hysteresis introduces nonlinearity to the system, which is the major obstacle to achieve a precise positioning. In this paper, the Preisach model is employed to describe the hysteresis characteristic of piezoelectric actuator and an inverse Preisach model is developed to construct a feedforward controller. Considering that the analytical expression of inverse Preisach model is difficult to derive and not suitable for practical application, a digital inverse model is established based on the input and output data of a piezoelectric actuator. Moreover, to mitigate the compensation error of the feedforward control, a feedback control scheme is implemented using different types of control algorithms in terms of PID control, fuzzy control, and fuzzy PID control. Extensive simulation studies are carried out using the three kinds of control systems. Comparative investigation reveals that the fuzzy PID control system with feedforward compensation is capable of providing quicker response and better control accuracy than the other two ones. It provides a promising way of precision control for piezoelectric actuator.

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