Abstract
International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 525-528 (2003) MaterialsNo AccessFUNCTIONAL MICRO DEVICES USING 'NANOPARTICLE-PHOTORESIST' COMPOSITESGREGOR WICHE, JOST GOETTERT, YUJUN SONG, JOSEF HORMES, and CHALLA S. S. R. KUMARGREGOR WICHECenter for Advanced Microstructures and Devices, Louisiana State University, 6980 Jefferson Hwy, Baton Rouge, LA 70806, USAInstitute for Microsystems Technology, Freiburg, Germany Search for more papers by this author , JOST GOETTERTCenter for Advanced Microstructures and Devices, Louisiana State University, 6980 Jefferson Hwy, Baton Rouge, LA 70806, USA Search for more papers by this author , YUJUN SONGCenter for Advanced Microstructures and Devices, Louisiana State University, 6980 Jefferson Hwy, Baton Rouge, LA 70806, USA Search for more papers by this author , JOSEF HORMESCenter for Advanced Microstructures and Devices, Louisiana State University, 6980 Jefferson Hwy, Baton Rouge, LA 70806, USA Search for more papers by this author , and CHALLA S. S. R. KUMARCenter for Advanced Microstructures and Devices, Louisiana State University, 6980 Jefferson Hwy, Baton Rouge, LA 70806, USA Search for more papers by this author https://doi.org/10.1142/S1465876303001678Cited by:2 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractWe have developed two fabrication routes for functional micro devices using SU-8/nanoparticle composites. In the first route, patterning of a 0.5% nanoparticle/SU-8 composite resulted in magnetic and luminescent polymeric microstructures. In the second route, a 42% nanoparticle/SU-8 composite was patterned followed by sintering to obtain free standing ceramic microstructures with aspect ratios as high as 16.Keywords:Nanoparticle-SU-8 CompositesLIGAFunctional polymeric microstructuresCeramic microstructures References W. Bauer and R. Knitter, J. Mater. Sci. 37, 3127 (2002). Crossref, Google Scholar A.M.Morales, Z.J.Zhang, D.Chinn, Fabrication of microstructures from polymer compositions containing ceramic nanoparticles, US Patent 6, 245,849 (2001) . Google ScholarB. Su, D. Zhang and T. W. Button, J. Mater. Sci. 37, 3123 (2002). Crossref, Google ScholarH. Baueret al., Microsystem technologies 9, 81 (2002). Crossref, Google ScholarH. Bonnemannet al., J. Org. Met. Chem. 520, 143 (1996). Crossref, Google ScholarD.-H. Chen and M.-H. Liao, J. Mol. Catal. B: Enzymatic 16, 283 (2002). Crossref, Google Scholar FiguresReferencesRelatedDetailsCited By 2An Epoxy Photoresist Modified by Luminescent Nanocrystals for the Fabrication of 3D High-Aspect-Ratio MicrostructuresC. Ingrosso, V. Fakhfouri, M. Striccoli, A. Agostiano and A. Voigt et al.2 August 2007 | Advanced Functional Materials, Vol. 17, No. 13Fabrication of an SU-8 based microfluidic reactor on a PEEK substrate sealed by a flexible semi-solid transfer (FST) processYujun Song, Challa S S R Kumar and Josef Hormes21 May 2004 | Journal of Micromechanics and Microengineering, Vol. 14, No. 7 Recommended Vol. 04, No. 03 Metrics History KeywordsNanoparticle-SU-8 CompositesLIGAFunctional polymeric microstructuresCeramic microstructuresPDF download
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