Abstract

The lattice-matching conditions in extremely heavily C-doped GaAs (GaAs:C) layers were systematically investigated by using X-ray diffraction measurements from the (004) and (115) planes. The GaAs:C was grown by gas-source molecular beam epitaxy using carbontetrabromide ( CBr4) and was fully elastically strained up to a carrier concentration of 5×1020 cm-3. Even when the GaAs:C was annealed at 550° C, pseudomorphic lattice matching was maintained in spite of the decrease in the carrier concentration and the perpendicular lattice mismatch at the interface. Application of this GaAs:C to the base of InGaP/GaAs HBTs resulted in a current gain as high as 40 at a doping level of 1 ×1020 cm-3.

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