Abstract
This paper focuses on the scheduling problem of batch processing workstation (BPW) of β1→β2 type in semiconductor wafer fabrication (SWF). The constraints consist of incompatible families, limited waiting time, and re-entrant flow. BPW is a bottleneck in SWF. In order to ensure BPW that can process full-batch continuously, a new pull-based scheduling algorithm is proposed. According to collaborative strategy, the pull-based scheduling algorithm consists of three sub-algorithms. They are one-to-one forming batch sub-algorithm, two-to-one forming batch sub-algorithm, and pulling preceding jobs sub-algorithm. The experiments are implemented on a scheduling simulation platform of SWF. In the whole scheduling horizon, the three sub-algorithms are executed circularly. The results show that the proposed approach obtains better solutions.
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