Abstract
In the development of MEMS, because of multi-disciplinary and multi-domain coupling characteristic, usually it needs many design departments' multi-disciplinary design teams to collaborate together to complete a component or system design. The design of MEMS is a concurrent design process. At the same time there are many designers and many kinds of design tools needed to carry on collaborative control and scheduling. The MEMS design process management serves as a central mechanism for supporting collaborative design and manufacturing. Moreover for the complexity and miniaturisation of MEMS, there are many experiences and knowledge deserved to be learned in the MEMS design process. It is necessary to describe design process of MEMS for reuse. MEMS design process description language (MDPDL) is presented and the syntax is discussed in detail. A framework model of MEMS design process management system is established. The modules of this model and corresponding functions are discussed.
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