Abstract
Piezoelectric actuators are increasingly popular for high-accuracy and high-speed nanopositioning systems. However, nonlinear rate-dependent hysteresis of piezoelectric actuators leads to many difficulties in accurately analyzing the dynamic characteristics of piezoelectric nanopositioning systems in a wide frequency band. This paper proposes fractional-order model methods to characterize the hysteresis of piezoelectric actuators in time and frequency domains. Input voltage and output displacement of the piezoelectric actuator in time domain are employed to identify the parameters of the fractional-order model. Moreover, amplitude and phase errors are utilized to obtain the fractional model in frequency domain. Simulations and experiments are performed to validate the effectiveness of the proposed fractional-order model. The results show that the identified model in frequency domain is preferable in a wider frequency range from 1 to 200 Hz, and the maximum error is about 4.47%.
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