Abstract
Different structures of multilayer hard coating thin-films have been fabricated on single crystal silicon and quartz substrates at room temperature by electrostatic self- assembly (ESA) method. This process involves the alternate dipping of oppositely charged polyelectrolytes. The ESA films have shown the formation of highly ordered and homogeneous structures with reduced voids. UV/VIs spectroscopy and ellipsometry were used to observe the ESA deposition process. The hardness and Young's modulus of the films were measured using nanoindentation technique.
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