Abstract
Abstract A special cathodic arc evaporation assembly including a heated cathode holder [Richter et al. Surf. Coat. Technol. (accepted)] makes it possible to operate the cathode at temperatures up to ca. 1000 °C. This device was utilized to demonstrate for the first time the feasibility of a cathodic arc evaporation of a boron cathode. By means of a magnetic coil (“arc filtering”) most of the macroparticles emitted from the cathode were kept from being incorporated into the film. Operating the novel boron arc evaporation source in a nitrogen environment, practically 100% cubic boron nitride (c-BN) films have been deposited. In addition to proper substrate bias as well as gas composition and pressure conditions the crucial measure to achieve cubic BN growth was the utilization of novel boron cathodes facilitating a sufficiently long period of continuous operation of the arc discharge. The c-BN films have been characterized with respect to their composition (elastic recoil detection analysis) and phase structure (Fourier transform infrared spectroscopy, transmission electron micrography).
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