Abstract
Nanowires deposited by focused electron beam-induced deposition (FEBID) of cobalt tricarbonyl nitrosyl (Co(CO)3NO) precursor have been thoroughly characterized from an electrical, magnetic, and structural point of view. Deposit composition and deposition yield have been studied as a function of beam energy and current. Atomic concentrations are weakly dependent on beam parameters and have average values of 49 at % for Co, 27 at % for O, 14 at % for N, and 10 at % for C. Deposition yield decreases as the beam energy increases, and strong enhancement (67×) is observed for deposition at 130 °C substrate temperature. FEBID nanowires are highly resistive (ρ = 6.3 mΩ cm at RT), and resistivity increases as T decreases with a power-law behavior typical of metal–insulator (M–I) nanogranular systems. Nonmagnetic behavior is revealed by magnetoresistance (MR) measurements. After 400 °C vacuum annealing, conductivity of the nanowire is greatly improved (ρ = 62 μΩ cm at RT), and a metallic-like resistivity is fully r...
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