Abstract
The bending sensor we propose for flexible microstructures, specifically the polydimethylsiloxane (PDMS) pneumatic balloon actuator (PBA), features a soft structure and flexible movement restricted by conventional solid-state sensors. The proposed sensor detects fluid resistance changes based on the bending of the fluidic PBA. We can use a pneumatic channel as the fluid-resistive bending sensor. We also designed a 5×10 mm×300 μ m PDMS cantilevered stiffness sensor by combining the PBA and the bending sensor for medical applications.
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