Fluid damping in resonant flexural plate wave device

Abstract

Fluid damping models are developed for resonant (standing wave) flexural plate wave (FPW) devices, which are rectangular plates or diaphragms with structural layers, a piezoelectric layer, and interdigitated conducting combs for driving and sensing. This configuration is often used in micromechanical chemical, biological, or nonvolatile residue sensors. Where much of the previous work on fluid effects in FPW devices focused on delay lines, this effort investigates resonant devices both analytically and experimentally. The fluid model is based on closed-form solution of a wide beam vibrating into a semi-infinite fluid volume and is mated directly into the beam equation. While the fluid's pressure versus wave motion solution has been reported previously, the application to the resonant FPW is mathematically rigorous and leads to a greater understanding of the FPW damping regimes. Frequency responses of FPW devices constructed from silicon with deposited piezoelectric aluminum nitride and operating in water and alcohol compared well with analytic results with some discrepancies noted.