Abstract
AbstractMass production of microfluidic devices commonly relies on injection molding. Injection molding requires a master surface made using micro or nanofabrication. Conventionally, electroplating from a silicon master is used for mold insert production, but this is expensive and cannot be used with masters produced via the Bosch process as interlocking of the scalloping between polymer and metal insert hinders part ejection. Here, an alternative to the electroplating process is developed by adapting a nanoimprint route to produce flexible micro‐structured polymer inserts capable of molding using a Bosch process‐produced master. An optimized fabrication approach using silicon masters with smooth sidewalls (produced using the mixed process) is used to characterize the limits of the process. Aspect ratios of 1 and below are successfully replicated. Feature spacings down to 20 µm are successfully produced with minimal variation between repeated parts. Masters produced using two different Bosch etches exhibiting both coarse and fine nanometer scalloping are also studied. Parts are successfully ejected with retained nanometer scalloping in all samples although inlay damage occurred after >10 replicas. A proof‐of‐concept microfluidic device is successfully produced vindicating the use of this approach as an efficient and cost‐effective approach for the rapid prototyping of complex micro‐structured designs.
Highlights
Mass production of microfluidic devices commonly relies on injection excellent platform for fluid control and manipulation
An example of high aspect ratio (AR) microfluidics can be found in the work of Hung et al.,[40] where a device was developed for culturing cells within microchambers with continuous perfusion of medium
Five scans were taken for the silicon and working stamp entries and five scans were taken for molded Parts 1, 10, and 20
Summary
Mass production of microfluidic devices commonly relies on injection excellent platform for fluid control and manipulation. Processes as well as enabling high aspect ratio (AR) replication.[4] The PDMS casting process is inexpensive and very simple, the process suffers from a low Hot embossing is another promising fabrication route used devices where at least one of the critical dimensions of the to develop microfluidic devices using thermoplastic polymers. On mal stresses in parts.[5] The main drawback of this approach is account of the micro-meter channel dimensions, a key advantage the limitation to successfully replicate complex 3D structures.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
