Abstract
An industry shift from aluminum-based hard-disk substrates to ceramic or glass substrates presents new challenges in high-precision machining. In this paper alternative brittle substrate materials are described. A fixed-abrasive grinding process is implemented using a specially configured precision grinding apparatus, and this process is proposed as an alternative to lapping and polishing for brittle substrates. Ductile-regime grinding techniques are used to machine ceramic substrates in one brittle material—glassy carbon—to optical quality on a two-axis, twin air-spindle grinding machine with nanometer-scale in-feed control. The machine's design and performance is described, as are a series of grinding experiments to fabricate glassy carbon hard-disks. Process innovations have resulted in a machine capable of finishing 0.9 mm-thick ceramic hard-disk substrates to 8 nm rms roughness and 8 μm flatness without lapping or polishing.
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