Abstract
The inchworm-driven actuator is an important type of piezo-driven actuators, which has high loading capacity, large motion range and high motion accuracy but involves complex structures, control and motion processes. In this paper, an inchworm type piezo-driven rotary actuator was introduced. Static and modal analyses of key units of the rotary actuator such as the clamping unit and the driving unit were carried out by finite element simulations to ensure that key units of the rotary actuator have enough strength and good dynamic characteristics. These simulation results will be helpful to improve structure design of the inchworm actuator.
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