Abstract
We have studied the conditions of synthesis and the fine structure of carbon films of various structural modifications possessing preset electrical properties. The phase diagram of polymorphous transformations is constructed for carbon films grown from the plasma of microwave discharge in low-pressure ethanol vapor. Technological factors influencing the efficiency of extracting diamondlike microcrystals from a hydrocarbon matrix have been studied. Depending on the extraction regime and initial layer thickness, the size of extracted microcrystals can vary from 10–12 to 100–120 nm, while their surface concentration may reach 1.4×107 cm−2.
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