Abstract
Mo-doped Bi3.35La0.75Ti3O12 (BLTM) films were deposited on Pt/Ti bottom electrodes by using a sol-gel method and crystallized at 700°C for 30 min in O2 atmosphere. The ferroelectric properties were greatly improved by substituting B-site ions with Mo ions and the BLTM films showed strong preferred (117) orientation. Typical remanent polarization (2Pr) and coercive field (2Ec) values were 32.0 μCċcm−2 and 158 kVċcm−1, respectively. It was also found that the leakage current densities in the BLTM films were lower than those in Bi3.35La0.75Ti3O12 (BLT) films.
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