Abstract
Nanoporous Si and SiO2 melting observed under high-power ion beam irradiation of nanosecond duration was investigated. The sizes of ellipsoidal particles formed in Si and those of holes formed in SiO2 under irradiation were determined. The possible origin of these morphology features was discussed.
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More From: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
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