Feasibility study of a smart motion generator utilizing electromagnetic microactuatorarrays

Abstract

We present a smart rigid body motion generator based on arrays ofelectromagnetically driven micromembrane actuators. Unlike previousmotion generators, this architecture employs a large number of micro-sized(100–200 µm) membrane actuators to simultaneously generate the displacement of a largerigid optical mirror. Thus the actuation structure bridges the gap between themicro and macro worlds as well as the incompatibility between MEMS fabricationand traditional optical manufacturing. In order to estimate the feasibility of thearchitecture, a systematic study was performed on the design and simulationof the individual micromembrane actuator. Each membrane actuator consistsof a high magnetization permanent magnet post structure supported by a thinmembrane and a planar coil to generate magnetic field. A 3D analytical model isutilized to analyze the actuation performance of an individual actuator cell. The 3Danalytical model is proved to be accurate by finite element modeling. It is suitable forfast prototyping design of magnetic actuators. Results show that the presentedrigid body motion generator has many advantages including the capabilities ofgenerating large displacement while maintaining fast frequency response and easymanufacturability.