Abstract
The project will determine if making a novel micro-plasma transistor device (MPT device) in LTCC is feasible and advantageous. MPT devices control plasma, created by an antenna, by using electrodes. Using LTCC could be beneficial due to its properties involving plasma erosion and the ability for integrated 3D electronic construction. The layer construction of LTCC makes it relatively easy to implement the design, using five layers to produce a variety of configurations. The device will consist of source, gate, and drain electrodes on different layers of LTCC, with the antenna creating the plasma. The MPT device will be fabricated using DuPont 951 LTCC tapes and the ceramic MEMS fabrication process. A test matrix will be made to understand how micro-plasma transistors behave in LTCC. The matrix will include variations in hole diameter and operational parameters such as electrode configuration and voltage. The MPT device will be tested at BSU using a vacuum chamber and associated electronic hardware. After the tests are administered, the feasibility of micro-plasma transistors in LTCC will be determined.
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