Abstract
In this paper we describe the process used to grow thin wall cylindrical shells by sputtering. The shells are grown on both sacrificial aluminum and reusable stainless steel mandrels. The post-deposition process used to remove the shells from the mandrels is described. The effects of deposition conditions and post-deposition treatment on crystallographic structure are presented. Comparisons of sputtered shells are made with conventionally machined shells with respect to crystallography, dimensional uniformity and performance. Some test results of sputtered thin wall cylindrical shells used as pressure-sensing elements are given.
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