Abstract
A biosensor formed by a combination of silicon (Si) micropore and graphene nanohole technology is expected to act as a promising device structure to interrogate single molecule biopolymers, such as deoxyribonucleic acid (DNA). This paper reports a novel technique of using a focused ion beam (FIB) as a tool for direct fabrication of both conical-shaped micropore in Si3N4/Si and a nanohole in graphene to act as a fluidic channel and sensing membrane, respectively. The thinning of thick Si substrate down to 50 µm has been performed prior to a multi-step milling of the conical-shaped micropore with final pore size of 3 µm. A transfer of graphene onto the fabricated conical-shaped micropore with little or no defect was successfully achieved using a newly developed all-dry transfer method. A circular shape graphene nanohole with diameter of about 30 nm was successfully obtained at beam exposure time of 0.1 s. This study opens a breakthrough in fabricating an integrated graphene nanohole and conical-shaped Si micropore structure for biosensor applications.
Highlights
Biosensors have attracted a great deal of attention for biological detection in the past three decades [1]; for example, deoxyribonucleic acid (DNA) biosensors are of major interest owing to their great promise for obtaining sequence-specific information in a faster, simpler and cheaper manner [2,3,4,5,6]
A two-dimensional nanomaterial, facilitated with a nanohole and integrated onto a solid-state micropore structure is considered as a promising alternative to realize a stable biosensor due to its one-atom thick layer and its extremely high surface-to-volume ratio, which enable it to be used as a highly sensitive membrane for the detection of biomaterials, such as DNA and protein [18,19,20,21,22,23]
We propose to utilize a focused ion beam (FIB) system we to directly to utilizeboth a focused ion beam micropore (FIB) system fabricate conical-shaped in fabricate conical-shaped in atoSidirectly substrate and a both nanohole in graphenemicropore after being a
Summary
Biosensors have attracted a great deal of attention for biological detection in the past three decades [1]; for example, DNA biosensors are of major interest owing to their great promise for obtaining sequence-specific information in a faster, simpler and cheaper manner [2,3,4,5,6]. The first biosensor of this kind was successfully demonstrated in 1996, using α-haemolysin as a sensing membrane to detect DNA molecules [6,9,10,11]. A two-dimensional nanomaterial, facilitated with a nanohole and integrated onto a solid-state micropore structure is considered as a promising alternative to realize a stable biosensor due to its one-atom thick layer and its extremely high surface-to-volume ratio, which enable it to be used as a highly sensitive membrane for the detection of biomaterials, such as DNA and protein [18,19,20,21,22,23].
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