Abstract
Nanopore and nanopore based bio-sensing technology have become into more and more interesting research area in the past ten years. In this work, micro-pore in Si-S3N4 chips was fabricated and characterized by Focused Ion Beam (dual Beam), and then the S3N4 pore was covered by Polycarbonate (PC) membrane containing 50nm nanopores and sealed by using polydimethylsiloxane (PDMS) to get hybrid micro-nanopores. The obtained chip with hybrid nanopores together with two liquid cells was integrated into an ionic current detection device for biosensing. Based on this device, λ-DNA in the electrolytic solution can be detected when it is electrophoretically driven through the hybrid nanopores, and different gestures of λ-DNA in translocation also can be discriminated.
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