Fabrication of Multilayer Metal-Dielectric Nanofilms for Coupled Plasmon Resonant Devices

Abstract

AbstractWe have developed a process for production of laterally continuous silver layers alternated with glassy polymer films in which the thickness is on the order of 15 nm and 100 nm respectively. Such films can be used to study physical phenomena associated with the coupled plasmon resonance and the resonant transmission in the forbidden bands. Such films may also find applications in photonic bandgap and other nanoplasmonic devices. Since the surface plasmon and evanescent coupling is a means to propagate light inside nanocircuits, the investigation of the coupled surface plasmon in the multilayer structures provides us with fundamental knowledge for the 3D integration. The fabrication technique also allows design flexibility, for example, systems with regions of single M-D-M plane together with multilayer structures facilitating tunable multiple plasmon resonance wavelength response from a single system. Multiple plasmon wavelength resonance absorptions may be obtained from such systems. Utilizing polymer films as the dielectric enables design flexibility and increases the number of applications of the fabricated devices.