Abstract
Microlenses can be widely used in integrated micro-optical systems. However, in some special applications, such as light field imaging systems, multifocal microlens arrays (MLA) are expected to improve imaging resolution. For the fabrication of multifocal MLA, the traditional fabrication method is no longer applicable. To solve this problem, a fabrication method of multifocal MLA by a one step exposure process is proposed. Through the analyses and research of photoresist AZ9260, the nonlinear relationship between exposure dose and exposure depth is established. In the design of the mask, the mask pattern is corrected according to the nonlinear relationship to obtain the final mask. The continuous surface of the multifocal MLA is fabricated by the mask moving exposure. The experimental results show that the prepared multifocal MLA has high filling factor and surface fidelity. What is more, this method is simple and efficient to use in practical applications.
Highlights
Microlens arrays (MLA), as increasingly important optical elements, have the characteristics of small volume, light weight and compact structure, and they provide a general method for the integration of micro optical systems
Sist and the required exposure dose during the fabrication of multifocal MLA, nonlinear resist and the required exposure dose during the fabrication of multifocal MLA, nonlinear correction is needed in the design of the mask
90the with nonlinear correction designed and According mask, the MLA is time is setwith to 5an min
Summary
Microlens arrays (MLA), as increasingly important optical elements, have the characteristics of small volume, light weight and compact structure, and they provide a general method for the integration of micro optical systems. The traditional fabrication methods of MLA are the thermal reflow technique [11,12], laser direct writing (LDW) [13,14,15,16], 3D printing [17,18], and ion irradiation [19,20]. Sang-in Bae proposed a new method combining multiple lithography and thermal reflow technology to prepare a multifocal MLA [12]. The MLA with multi focus and uniform aperture was prepared using the micropore as a mold [27], this method needs to design each inclined wall angle separately to obtain the multifocal MLA, and the process is cumbersome.
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