Abstract

ABSTRACTWe have proposed the fabrication of high-contrast-moth-eye structure using continuous wave (CW) laser. Nonlinear-optical reaction time constant of the photoresist can be controlled by manipulating the exposure intensity and scanning speed of the laser. As a result, shortening the time constant in the intense beam area and lengthening that in the weak beam area compared with the scanning speed, we can limit the exposed area.

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