Abstract
ABSTRACTWe demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 105 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.
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