Abstract
Resonance domain diffraction gratings with local periods near the wavelength may have very high diffraction efficiencies. Unfortunately, they are difficult to fabricate, especially for use with light in visible and shorter wavelengths. We present several methods for fabricating surface relief resonance domain diffraction gratings used in the visible spectral region. We also optimize the relevant fabrication parameters and compare the resulting performance for each method. For the fabrication, we resort to e-beam lithography and reactive ion etching. Characterization is performed with environmental scanning electron microscopy, atomic force microscopy, and optical measurements on representative structures. Nearly 100% Bragg diffraction efficiency can be achieved with transmission resonance domain binary gratings formed in fused silica and having a period of 0.5 μm and a groove depth of 1 μm.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
