Fabrication of graphene field effect transistors on complex non-planar surfaces

Abstract

Graphene field effect transistors (GFETs) are promising devices for biochemical sensing. Integrating GFETs onto complex non-planar surfaces could uncap their potential in emerging areas of wearable electronics, such as smart contact lenses and microneedle sensing. However, the fabrication of GFETs on non-planar surfaces is challenging using conventional lithography approaches. Here, we develop a combined spray-coating and photolithography setup for the scalable fabrication of GFETs on non-planar surfaces and demonstrate their application as integrated GFETs on microneedles. We optimize the setup to pattern ∼ 67 μm long GFET channels across the microneedle tips. Graphene is deposited between photo-patterned electrodes by spray-coating a liquid-phase exfoliated graphene ink while monitoring the channel resistance to achieve the required conductivity. The formation of the GFET channels is confirmed by SEM and EDX mapping, and the GFETs are shown to modulate in solution. This demonstrates an approach for manufacturing graphene electronic devices on complex non-planar surfaces like microneedles and opens possibilities for wearable GFET microneedle sensors for real-time monitoring of biomarkers.