Abstract
Self-assembled cluster arrays formed at the initial stage of Mo(110) oxidation and subsequent fabrication of comblike structures have been studied by scanning tunneling microscopy. After 180L oxygen exposure, large protrusions are arranged as self-assembly along the [1¯13] or [11¯3] direction. The average diameter and height of each protrusion are estimated to be approximately 0.8 and 0.15–0.2nm, which correspond to the sizes of clusters of several atoms. The cluster arrays correspond to the MoO3 nucleation at the antiphase boundaries of the MoO2 surface. After thermal evaporation of the cluster arrays, comblike step structures consisting of narrow branches and trenches are obtained.
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