Abstract
The biodegradable polymer poly(l-lactide) (PLLA) was introduced for the fabrication of micromechanical devices. For this purpose, thin biopolymer films with thickness around 10μm were spin-coated on silicon substrates. Patterning of microcantilevers is achieved by nanoimprint lithography. A major challenge was the high adhesion between PLLA and silicon stamp. Optimized stamp fabrication and the deposition of a 125nm thick fluorocarbon anti-stiction coating on the PLLA allowed the fabrication of biopolymer cantilevers. Resonance frequency measurements were used to estimate the Young’s modulus of the device material.
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