Abstract

The morphous silicon germanium (a-SiGe) thin films are fabricated in a radio frequency plasma enhanced chemical vapor deposition system. This paper summarizes our recent works on how to make a suitable a-SiGe solar cell to enhance the light absorption in the long wavelength region. Up to now, a single junction p-i-n a-SiGe solar cell with an initial efficiency of 9.06% is obtained. The long wavelength response in QE is broadened to 950 nm. The QE reaches about 26.63% at 800 nm wavelength.

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