Abstract
This paper presents the characteristics of the first microactuator using magnetic fluid (MF). MF actuators with flat and corrugated diaphragms are fabricated by the micromachining technique and their deflections are measured. The MF actuator consists of an inductor, a fluid chamber filled with magnetic fluid, and a parylene diaphragm. In the presence of the magnetic field, magnetic fluid easily deforms its shape and generates some pressure. The relation between the MF pressure and magnetic flux density is obtained by the comparison of the deflection for the applied air pressure with that for the MF pressure. At 110 Gauss, the deflection of MF actuator with corrugated parylene diaphragm is more than 200 μm and the generated MF pressure is 2.8 kPa. The successful operation of the first MF actuator shows the high potential for the application to the micromachined devices.
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