Abstract
In this study, a hybrid sol-gel method was used to fabricate Pb(Zr0.52Ti0.48)0.98Nb0.02O3 (PNZT) piezoelectric thick films. By preparing Pb(Zr0.52Ti0.48)0.98Nb0·02O3 sol-gel solutions and mixing them with PZT-5A piezoelectric powders, therefore, the thickness of single layer coating can be increased and reduce the risk of film cracks. The proposed PNZT films have the dielectric constant of 1750, dielectric loss of 0.063, remnant polarization of 58 μC/cm2, and d33 of 133 p.m./V. Piezoelectric cantilever beam MEMS accelerometers were then designed, simulated and fabricated via photolithography methods on Si substrates. The sensitivity and natural frequency of the cantilever beam accelerometer are 16.8 mV/g and 200Hz, respectively. Finally, a cantilever beam accelerometer is successfully applied for the server hard-drive fault detection.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
