Fabrication and characterization of metallic glasses with a specific microstructure for micro-electro-mechanical system applications

Abstract

Metallic glass microstructures with high aspect ratios for micro-electro-mechanical system applications have been fabricated by micro-electro-discharge machining and selective electrochemical dissolution methods. Micro-holes and three-dimensional microstructures machined on the La62Al14Ni12Cu12, Zr55Al10Ni5Cu30 and Cu46Zr44Al7Y3 bulk metallic glasses by micro-electro-discharge machining are evaluated by using X-ray diffraction, scanning electron microscopy, and nanoindentation. The experimental results demonstrate that the machined samples kept their amorphous structure without devitrification, and their machining characteristics are related to the thermo-physical properties of the alloys and the electrode diameters. Porous, single-pore and thin-walled Zr-based metallic glass tubes with micro-pore structures can be prepared by selective electrochemical dissolution method. The high aspect ratio microstructures fabricated by the two methods have the potential applications as micro-nozzles, polymer micro-injection molding tools, micro-channels or micro-flow meters in micro-electro-mechanical system devices.