Abstract
Diamond-like carbon (DLC) thin films have shown advantageous field emission properties due to a negative electron affinity (NEA) and low work function. The experiment was performed at substrate temperature in the range of room temperature to 600°C. The laser energy density used was in the range 6–20 J/cm 2. SEM, Raman, photoluminescence (PL), XPS and I– V measurement were used to investigate the microstructure and the field emission properties of DLC thin films. Deposition parameters, such as laser energy density and substrate temperature were optimized for the application of field emission properties. Good field emission properties were obtained with E th=5.03 V/μm at 300°C and 12 J/cm 2.
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