Abstract
This paper reports the correlation between the microstructure and the physical properties of transparent BaTi0.85Sn0.15O3 (BTS) thin films with thicknesses of 90–360nm by radio frequency magnetron sputtering on the tin doped indium oxide (ITO)/glass substrate. All of the BTS/ITO/glass samples have relatively high optical transparency with over 75% in the visible light region. The dielectric constant and tunability of BTS films increase with thickness due to comparatively better crystallinity. The thicker BTS film is observed in an inter-diffusion between BTS film and ITO electrode from the result of secondary ion mass spectrometry depth profiling and then shown in a higher leakage current density.
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