Abstract
The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.
Highlights
Microtechnologies provide undeniable advantages in handling biological samples for biomedical applications
As this review focuses on silicon-based microelectromechanical systems (MEMS) devices, we will briefly introduce the most common actuation methods used in MEMS devices
Over the years, MEMS resonators have evolved from relatively simple detection devices to become devices capable of intricate analysis of cellular functions for drug testing and other applications [38]
Summary
Microtechnologies provide undeniable advantages in handling biological samples for biomedical applications. For example, show tremendous potential as their highly sensitive measurement capacity and dynamic characteristics allow them to be excellent tools for sensing applications [36] Such silicon-based MEMS resonators can be used for monitoring biochemical reactions [39], label-free detection of biological molecules [22]. Another possible reason is that mechanical and electrical systems do not always exhibit optimal performance in liquid due to the formation of electrical double layers and high mechanical damping Solving these known issues with innovative fabrication processes or alternative approaches reveals the true potential of silicon-based MEMS devices to provide high signalto-noise ratios, sensitive measurements, stable and high-resolution mechanical stimulation, automatable handling, and multiplexed functionality, all of which are critical for practical use in biological and clinical applications requiring high performance. As there have been excellent reviews focusing on detection with cantilever-based resonators [41] and various principles of detection [38], we pay more attention to more intricate designs and methods in addition to the variety of targeted biological samples and their practical scientific and medical applications
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