Abstract
Two types of the large bimorph deformable mirrors with the size of 410x468 mm and 320 mm were developed and tested. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer and a Shack- Hartmann wavefront sensor has shown that it was possible to improve the flatness of the surface down to a residual roughness of 0.033 μm (RMS). The possibility of correction of the aberrations in high power lasers was numerically demonstrated.
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