Abstract
A high-density digital versatile disk (HD-DVD) is being developed, aiming for high definition television. It is thought that the capacity of HD-DVD would be 15 GB, for example when its track pitch is 0.42 µm, its minimum mark length must be 0.22 µm. To fabricate such a high-density optical disk, we develop an exposure method using a photoresist mask. Super-resolution is also studied in order to make the exposure beam diameter smaller.
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