Experimental study on electrochemical discharge machining of glass micro-holes with high-quality

Abstract

With the development of micro-electromechanical systems, the micro-holes structure of non-conductive hard and brittle materials has been widely used in aerospace, automotive electronics, biomedicine, national defense science and technology and other fields. However, due to the properties of the non-conductive hard and brittle material itself, it is very difficult to fabricate the micro-holes structure. In order to improve the machining localization of glass micro-holes and reduce the possibility of micro-holes outlet damage, the micro-electrochemical discharge process was studied and optimized. Firstly, according to the principle of electrochemical discharge, the influence of discharge energy on the micro-holes machining technology of glass was analyzed, and the energy control model of electrochemical discharge was established. Secondly, according to the experiment, the influence of pulse voltage, frequency and feed rate on the inlet diameter and outlet quality of micro-holes were analyzed. Finally, select the optimized combination of machining parameters to successfully fabricate the 3×3 high quality glass micro-holes array with the inlet diameter is 172um and the outlet diameter is 167um. The experimental results show that the control of the discharge energy can improve the machining localization of glass micro-holes and reduce the possibility of micro-holes outlet damage.