Abstract
Summary form only given, as follows. An ion diffusing into metal by means of a double glow discharge is a new plasma surface metallurgic technique. In a vacuum chamber, the source pole and the cathode are put in parallel to each other. The wall of vacuum chamber is a common anode. The cross-interaction between the plasma of the cathode and the source pole is a kinetic process in dynamic equilibrium. The experimental results show that the distribution of plasma density (n/sub i/) in vacuum chamber is not uniform and the strong edge-effect exists in a double glow discharge. The cross-interaction mechanism of two plasmas in a double glow discharge is studied by experiment and theory.
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