Abstract
We demonstrated microscale cooling by a solid state micro magnetic refrigerator (SSMMR). The SSMMR consists of thermally isolated magnetic material (La(Fe x Si 1−x ) 13 H y ), two thermal switches and a magnetic field switch. Thermal isolation structure and thermal switch were fabricated using MEMS fabrication process. The magnetic field switch were designed and fabricated to change the magnetic flux density between 0 T and 1 T. Under this magnitude of magnetic field modulation, the La(Fe x Si 1−x ) 13 H y showed a temperature change of ca. 1 °C. By the refrigeration cycle, about 0.6 °C cooling effect was observed on the thermally isolated cold plate. From these results, the estimated cooling power of the SSMMR was ca. 9 μW.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
